1.中国科学院大学集成电路学院;2.中国科学技术大学微电子学院;3.中国科学院半导体研究所半导体集成技术工程研究中心;4.湖北九峰山实验室研究中心
国家自然科学基金(61971395)
1.School of Integrated Circuits, University of Chinese Academy of Sciences;2.School of Microelectronics, University of Science and Technology of China;3.Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences;4.Research Center, HuBei Jiufengshan Laboratory
Supported by the National Natural Science Foundation of China (61971395)