基于Fowler-Nordheim隧穿模型提取层状h-BN的有效质量参数
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南通大学

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国家自然科学基金项目(面上项目,重点项目,重大项目)(62074085 、 62104118)


Extracting the effective mass of fewer layers 2D h-BN nanosheets using the Fowler Nordheim tunneling model
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Nantong University

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National Natural Science Foundation of China (62074085 and 62104118)

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    摘要:

    六方氮化硼(h-BN)由于其优良特性被广泛应用于栅介质层、钝化层、隧穿层等功能。目前,对关于超薄h-BN的基本物理性质和其中的电子隧穿效应的研究还存在不足。本文采用实验与理论相结合的研究方法,通过拟合金属/绝缘体/金属结构的电流-电压曲线成功提取了不同层数h-BN的有效质量。结果显示在4~22层范围内,h-BN的有效质量随着层数的增加而单调下降。文中利用已提取的有效质量精确确定当h-BN中发生电子隧穿时,Fowler–Nordheim隧穿模型的物理参数。此外,本文使用该物理参数在Sentaurus TCAD软件中研究了金属/h-BN界面处固定电荷以及不同种类的金属电极对该结构中Fowler–Nordheim隧穿的影响。这项工作对促进h-BN相关红外物理和技术领域的应用具有一定的参考和指导意义。

    Abstract:

    Hexagonal boron nitride (h-BN) finds widespread application, including gate dielectrics, passivation layers, and tunneling layers, owing to its outstanding properties. The current studies on the fundamental physical properties of these ultrathin h-BN films and the electron tunneling effect among them are inadequate. In this work, the effective mass in h-BN was successfully determined through a combined approach of experimental and theoretical research methods by fitting the current-voltage curves of metal/insulator/metal structures. It was observed that within a range of 4~22 layers, the effective mass of h-BN exhibits a monotonic decrease with an increase in the number of layers. Precisely ascertain the physical parameters of the Fowler-Nordheim tunneling model in the context of electron tunneling in h-BN by utilizing the extracted effective mass. Additionally, the impact of fixed charges at the metal/h-BN interface and various metal electrode types on Fowler-Nordheim tunneling within this structure was investigated utilizing this physical parameter in Sentaurus TCAD software. This work is informative and instructive in promoting applications in the fields of h-BN related infrared physics and technology.

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  • 收稿日期:2023-09-20
  • 最后修改日期:2023-10-08
  • 录用日期:2023-10-10
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