12.5微米1024×1024长波InAs/GaSb II类超晶格红外焦平面探测器
作者:
作者单位:

中国科学院上海技术物理研究所上海市玉田路500号,200083

作者简介:

通讯作者:

中图分类号:

基金项目:

国家自然科学基金(62222412,62004205,62104236,62104237,61904183,61974152,62335017),国家重点研发计划(2022YFB3606800,2022YFB3404405),中国科学院青年创新促进会(Y202057),上海市科技启明星计划(21YF1455000)。


12.5μm 1024×1024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays
Author:
Affiliation:

Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Shanghai 200083,China

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    本文报道了12.5微米的InAs/GaSb II类超晶格长波红外焦平面探测器。实验采用分子束外延技术在GaSb衬底上生长超晶格材料。吸收区超晶格结构为15ML(InAs)/7ML(GaSb)。探测器采用PBπBN的双势垒结构以抑制长波探测器暗电流。研制了规模为1024×1024,像元中心距为18×18μm的长波焦平面探测器。采用金属杜瓦封装,与制冷机耦合形成超晶格长波探测器制冷组件。在60K温度下测试了探测器各项性能。探测器50%截止波长为12.5微米,平均峰值探测率达到6.6×1010cmHz1/2W-1,盲元率为1.05%,噪声等效温差NETD为21.2mK。红外焦平面成像测试得到清晰的长波成像。

    Abstract:

    In this paper, we report research results of 12.5μm long-wavelength infrared InAs/GaSb superlattice focal plane arrays. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy ( MBE) technology. The respective structure of absorption region is 15ML ( InAs) /7ML ( GaSb). The detector adopts PBπBN double barrier structure to suppress the dark current. A long-wave focal plane detector with the size of 1024×1024 and the pixel center-to-center distance of 18×18μm was developed. The detector is packaged by a metal dewar, and a superlattice long-wavelength detector cryocooler assembly is formed by coupling with a refrigerator. At 60 K measurement, the detector has 50% cut-off wavelength of 12.5μm, The detector has a peak detectivity of 6.6×1010cmHz1/2W-1 , dead pixels rate of 1.05% and a noise equivalent temperature difference (NETD) is 21.2mK. Infrared images of this detector has been taken using infrared imaging test.

    参考文献
    相似文献
    引证文献
引用本文
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2023-09-19
  • 最后修改日期:2024-07-18
  • 录用日期:2023-09-27
  • 在线发布日期: 2024-07-11
  • 出版日期:
文章二维码