MOPA半导体激光器的偏振控制研究
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1.中国工程物理研究院 高能激光重点实验室,四川 绵阳 621900;2.中国工程物理研究院 应用电子学研究所,四川 绵阳 621900;3.中国科学院领因半导体研究所,北京 100083

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O43

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Research on polarization control of MOPA semiconductor laser
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1.The Key Laboratory of Science and Technology on High Energy Laser, China Academy of Engineering Physics, Mianyang 621900, China;2.Institute of Applied Electronics, China Academy of Engineering Physics, Mianyang 621900, China;3.Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China

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    摘要:

    主控振荡功率放大(MOPA)激光器因可实现高功率、高光束质量输出而受到越来越多的关注。为了提高MOPA激光器的偏振度以减小偏振合束时的效率损失,有源区采用InGaAs/AlGaAs压应变单量子阱,脊型波导1.35 μm的深刻蚀设计提高了TE模式的光限制因子,锥形放大器采用金属应力调控增加量子阱中的压应变。结合这两种方案,不仅提高了两个区域的偏振度,同时减小了偏振角度差。采用标准工艺制备的MOPA器件,实现了11 W@15 A连续输出和90%以上的偏振度。

    Abstract:

    The master oscillator power amplifier (MOPA) laser is receiving increasing attention due to its ability to achieve high power and beam quality output. In order to improve the polarization degree of MOPA laser and reduce the efficiency loss during polarization combining, InGaAs/AlGaAs compressive single quantum well was used in the active region. The optical confinement factor of TE-mode in ridge waveguide was improved by 1.35 μm deep etching, whereas the TE optical gain in tapered amplifier was increased through on-chip metal stress regulation. Combining the two schemes not only improves the degrees of polarization (DOP) of two sections, but also reduces the polarization angle difference. Finally, 11 W@15 A continuous output and over 90% DOP of the MOPA have been achieved by standard process fabrication.

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王浩淼,贺钰雯,李弋,胡耀,张亮,杜维川,高松信,唐淳,马骁宇,刘素平. MOPA半导体激光器的偏振控制研究[J].红外与毫米波学报,2024,43(6):762~767]. WANG Hao-Miao, HE Yu-Wen, LI Yi, HU Yao, ZHANG Liang, DU Wei-Chuan, GAO Song-Xin, TANG Chun, MA Xiao-Yu, LIU Su-Ping. Research on polarization control of MOPA semiconductor laser[J]. J. Infrared Millim. Waves,2024,43(6):762~767.]

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  • 收稿日期:2023-08-29
  • 最后修改日期:2024-11-12
  • 录用日期:2023-09-27
  • 在线发布日期: 2024-11-12
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