一种改进的基于110 GHz在片S参数测试的HEMT器件寄生电阻提取方法
作者:
作者单位:

1.华东师范大学 物理与电子科学学院,上海 200241;2.南通大学 交通与土木工程学院,江苏 南通 226019

中图分类号:

TN215


An improved method for determination of extrinsic resistances for HEMT devices based on 110 GHz S-parameters on-wafer measurement
Author:
Affiliation:

1.School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China;2.School of Transportation and Civil Engineering, Nantong University, Nantong 226019, China

Fund Project:

Supported by the National Natural Science Foundation of China (62201293,62034003)

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    摘要:

    提出了一种改进的高电子迁移率晶体管寄生电阻提取方法,该方法利用了特殊偏置点 (Vgs>VthVds=0V)的等效电路模型, 推导了寄生电阻的表达式,采用半分析法对寄生电阻进行了优化。1~110 GHz S参数实测结果和仿真的S参数一致,证明该方法是有效的。

    Abstract:

    An improved method for determination of extrinsic resistances for 70 nm InP high electron mobility transistor (HEMT) is proposed in this paper. A set of expressions have been derived from the equivalent circuit model under operating bias points (Vgs > VthVds = 0 V). The extrinsic resistances are iterative determined using the discrepancy between simulated and measured S-parameters as an optimization criterion using the semi-analytical method. Good agreement between simulated and measured S-parameters under multi bias over the frequency range up to 110 GHz verifies the effectiveness of this extraction method.

    参考文献
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李织纯,吕渊婷,张傲,高建军.一种改进的基于110 GHz在片S参数测试的HEMT器件寄生电阻提取方法[J].红外与毫米波学报,2024,43(1):105~110]. LI Zhi-Chun, LYU Yuan-Ting, ZHANG Ao, GAO Jian-Jun. An improved method for determination of extrinsic resistances for HEMT devices based on 110 GHz S-parameters on-wafer measurement[J]. J. Infrared Millim. Waves,2024,43(1):105~110.]

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  • 收稿日期:2023-05-23
  • 最后修改日期:2023-11-06
  • 录用日期:2023-06-23
  • 在线发布日期: 2024-01-17
  • 出版日期: 2024-02-25
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