高工作温度中波红外碲镉汞焦平面研究
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昆明物理研究所,云南 昆明 650223

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TN215

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High operating temperature mid-wavelength infrared HgCdTe focal plane arrays
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Kunming Institute of Physics, Kunming 650223, China

Fund Project:

Supported by National Key Research and Development Program of China (SQ2020YFB200190).

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    摘要:

    该文报道了昆明物理研究所高工作温度中波红外碲镉汞焦平面探测器器件的研究情况。通过优化焦平面器件结构参数,采用As离子注入形成p-on-n平面结器件技术,在液相外延生长的高质量原位In掺杂的碲镉汞薄膜上制备了阵列规格为640×512@15μm的中波红外焦平面探测器。利用变温杜瓦测试了焦平面芯片在不同工作温度下的光谱响应、器件暗电流、噪声等效温差、有效像元率以及盲元分布等,测试结果表明器件具备180K以上工作温度的能力。

    Abstract:

    This paper presents the recent progress in the research of high operating temperature (HOT) mid-wavelength infrared (MWIR) HgCdTe focal plane arrays (FPAs) at Kunming Institute of Physics. By optimizing the structural parameters of mid-wavelength infrared HgCdTe detectors, a 640×512@15 μm mid-wavelength infrared focal plane array (FPA) was fabricated based on high-quality in situ indium-doped HgCdTe film grown by liquid phase epitaxy (LPE) using arsenic-ion-implanted p-on-n planar junction device technology. The spectral response, device dark current, noise equivalent temperature difference (NETD), operability, and the distribution of defective pixels of the prepared p-on-n chip arrays at various operating temperatures were tested using a variable temperature Dewar. The test results demonstrate that the detector has the ability to operate at temperatures above 180 K.

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覃钢,秦强,何天应,宋林伟,左大凡,杨超伟,李红福,李轶民,孔金丞,赵鹏,赵俊.高工作温度中波红外碲镉汞焦平面研究[J].红外与毫米波学报,2023,42(5):588~593]. QIN Gang, QIN Qiang, HE Tian-Ying, SONG Lin-Wei, ZUO Da-Fan, YANG Chao-Wei, LI Hong-Fu, LI Yi-Min, KONG Jin-Cheng, ZHAO Peng, ZHAO Jun. High operating temperature mid-wavelength infrared HgCdTe focal plane arrays[J]. J. Infrared Millim. Waves,2023,42(5):588~593.]

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  • 收稿日期:2023-03-31
  • 最后修改日期:2023-08-09
  • 录用日期:2023-05-17
  • 在线发布日期: 2023-08-07
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