氧气传感760 nm垂直腔面发射半导体激光器
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作者单位:

1.中国科学院长春光学精密机械与物理研究所 发光学及应用国家重点实验室,吉林 长春 130033;2.中国科学院大学,北京 100049;3.长春中科长光时空光电技术有限公司,吉林 长春 130102

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中图分类号:

TN248.4

基金项目:

国家自然基金重大项目(62090060);国家自然科学基金项目(61874117, 61874119, 11774343);吉林省重点科技攻关项目(20220201063GX)


The 760 nm-vertical cavity surface emitting laser for the oxygen sensing
Author:
Affiliation:

1.State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics , Chinese Academy of Sciences, Changchun 130033,China;2.University of Chinese Academy of Sciences, Beijing 100049,China;3.Ace Photonics Co. Ltd., Changchun 130102, China

Fund Project:

Supported by the Major Program of the National Natural Science Foundation of China (62090060) ; the National Natural Science Foundation of China (61874117, 61874119, 11774343) ; and the Science and Technology Development Project of Jilin Province (20220201063GX)

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    摘要:

    在国内首次报道了氧气传感专用760 nm单模、波长可调谐的垂直腔面发射激光器 (Vertical Cavity Surface-Emitting Laser, VCSEL),详细报道了760 nm VCSEL设计方法与器件制备结果。通过分析AlGaAs量子阱的增益特性,确定了量子阱组分及厚度参数,并设计了室温下增益峰与腔模失配为10 nm的VCSEL激光器结构,完成了VCSEL结构的器件制备。VCSEL激光器在工作温度25 °C时单模功率超过2 mW ,此时边模抑制比为28.1 dB,发散角全角为18.6°。随着工作电流增加,VCSEL激光器的发散角随之增加,然而激光远场光斑仍然为高斯形貌的圆形对称光斑。通过调节VCSEL激光器的工作温度与工作电流,实现了VCSEL单模激光波长从758.740 nm至764.200 nm的近线性连续调谐,VCSEL工作在15 ~ 35 °C时激光波长的电流调谐系数由1.120 nm/mA变至1.192 nm/mA; 温度调谐系数由0.072 nm/°C变至0.077 nm/°C。在两个氧气特征吸收波长附近,VCSEL激光的边模抑制比分别达到了32.6 dB与30.4 dB。

    Abstract:

    A 760 nm single-mode, wavelength-tunable Vertical Cavity Surface-Emitting Laser (VCSEL) for oxygen sensing has been reported. The design method and device fabrication results of the 760 nm VCSEL have been reported in detail. By analyzing the gain characteristics of AlGaAs quantum wells, the composition and thickness of the quantum wells were determined, and the VCSEL structure with a gain peak and cavity mode mismatch of 10 nm at room temperature was designed. The single-mode power of the VCSEL exceeds 2 mW when the operating temperature is 25 °C, the side-mode suppression ratio (SMSR) is 28.1 dB, and the full angle of the divergence angle is 18.6°. As the operating current increases, the divergence angle of the VCSEL laser increases, but the far-field is still a circular and symmetrical spot with a Gaussian shape. By tuning the operating temperature and operating current of the VCSEL laser, the single-mode wavelength of the VCSEL can be continuously tuned from 758.740 nm to 764.200 nm. The current tuning coefficient of the laser wavelength changes from 1.120 nm/mA to 1.192 nm/mA, and the temperature tuning coefficient changes from 0.072 nm/℃ to 0.077 nm/℃ when the VCSEL operates at 15-35 °C. The SMSR of the VCSEL laser reaches 32.6 dB and 30.4 dB near the two characteristic absorption wavelengths of oxygen.

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刘天娇,徐玥辉,张建伟,张星,张卓,宫玉祥,周寅利,慕京飞,陈超,吴昊,宁永强,王立军.氧气传感760 nm垂直腔面发射半导体激光器[J].红外与毫米波学报,2023,42(4):441~449]. LIU Tian-Jiao, XU Yue-Hui, ZHANG Jian-Wei, ZHANG Xing, ZHANG Zhuo, GONG Yu-Xiang, ZHOU Yin-Li, MU Jing-Fei, CHEN Chao, WU Hao, NING Yong-Qiang, WANG Li-Jun. The 760 nm-vertical cavity surface emitting laser for the oxygen sensing[J]. J. Infrared Millim. Waves,2023,42(4):441~449.]

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  • 收稿日期:2022-11-24
  • 最后修改日期:2023-06-05
  • 录用日期:2023-02-01
  • 在线发布日期: 2023-06-02
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