高纯度石英玻璃40~110 GHz频段电参数的表征
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1.电子科技大学,四川 成都 611731;2.中国工程物理研究院 微系统与太赫兹研究中心,四川 成都 610200;3.西南科技大学 制造过程测试技术教育部重点实验室, 四川 绵阳 621010

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TN817;TN815

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Characterization of electrical parameters of high-purity quartz glass in the 40-110 GHz frequency band
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1.University of Electronic Science and Technology of China, Chengdu 611731, China;2.Microsystem & Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China;3.Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology, Mianyang 621010, China

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    摘要:

    基于127 μm的高纯度石英(99.999 7%)基底设计了共面波导(CPW)、微带环形谐振器(MRR)结构,通过测试得到在40~110 GHz的频率范围内,CPW线的平均插入损耗在0.096~0.176 dB/mm之间。此外,采用MRR方法提取了石英的相对介电常数和损耗角正切值,该石英基底在V波段和W波段的相对介电常数分别介于3.7~3.85和3.85~4之间,损耗角正切值在V波段约为0.004,在W波段介于0.004~0.006之间。通过与其他基底性能对比表明,该高纯度石英具有良好稳定的电性能,其在设计高性能无源和封装结构方面具有一定的潜力。

    Abstract:

    The transmission line structures such as coplanar waveguide (CPW) and microstrip ring resonator (MRR) were designed on a high-purity quartz substrate (99.9997%) with a thickness of 127 μm. The average insertion loss for the CPW line varied from 0.096 to 0.176 dB/mm in the frequency range of 40-110 GHz. Furthermore, the relative permittivity and loss tangent of the quartz were extracted by the MRR method. The relative permittivity of the quartz substrate in the V-band and W-band ranged with 3.7-3.85 and 3.85-4, respectively. The loss tangent value was approximately 0.004 in the V-band and 0.004-0.006 in the W-band. The performance comparison with other substrates shows that this high-purity quartz has excellent and stable electrical properties and its potential for designing high-performance passive and packaging structures.

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朱香宝,孙旭,岳海昆,钱凌轩,倪磊.高纯度石英玻璃40~110 GHz频段电参数的表征[J].红外与毫米波学报,2023,42(4):490~496]. ZHU Xiang-Bao, SUN Xu, YUE Hai-Kun, QIAN Ling-Xuan, NI Lei. Characterization of electrical parameters of high-purity quartz glass in the 40-110 GHz frequency band[J]. J. Infrared Millim. Waves,2023,42(4):490~496.]

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  • 收稿日期:2022-09-28
  • 最后修改日期:2023-06-05
  • 录用日期:2023-02-28
  • 在线发布日期: 2023-06-02
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