PbSe光电导焦平面阵列探测器
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作者单位:

浙江大学 物理学院 浙江省量子技术和器件重点实验室,浙江 杭州 310027

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中图分类号:

O472+.3

基金项目:

国家自然科学基金(11933006),中德科学基金(GZ 1580)


Photoconductive focal plane arrays infrared detector based on PbSe
Author:
Affiliation:

School of Physics, Zhejiang Province Key Laboratory of Quantum Technology and Devices, Zhejiang University, Hangzhou 310027, China

Fund Project:

Supported by National Natural Science Foundation of China (11933006), and the Sino-German Center for Science (GZ 1580)

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    摘要:

    应用半导体非平衡载流子连续性方程模拟了PbSe光电导红外探测器参数对光电响应的影响,实验研制了小规模像元的x-y寻址型PbSe光电导焦平面阵列(FPA)探测器,像元尺寸为500 μm×500 μm,像元间距为500 μm。实验表征了PbSe FPA探测器像元的光电响应性能,有效像元率达到了100%。500 K温度黑体辐射和3.0V偏压下像元的黑体响应率的范围是70~146 mA/W,平均响应率和平均探测率分别达到了110 mA/W和5.5×109。像元的噪声等效温差(NETD)范围是15~81mK,平均噪声等效温差为32 mK。使用中波红外成像装置,初步演示了PbSe FPA探测器对350~450℃热辐射目标的红外成像。为后续研制高密度像元PbSe FPA探测器奠定了基础。

    Abstract:

    The influence of the parameters of PbSe photoconductive infrared detector on the photoelectric response was simulated by the continuity equation of semiconductor non-equilibrium carriers. A small-scale pixel x-y addressable PbSe photoconductive focal plane array (FPA) detector was developed experimentally. The pixel size was 500 μm×500 μm, and the pixel pitch was 500 μm. The photoelectric response performance of the pixels of the PbSe FPA detector was experimentally characterized, and the effective pixel rate reached 100%. Under 500 K temperature blackbody radiation and 3.0 V bias voltage, the average responsivity and detectivity reached 110 mA/W and 5.5×109 cmHz1/2W-1, respectively. The noise equivalent temperature difference (NETD) of the pixels ranged from 15 to 81 mK, and the average noise equivalent temperature difference was 32mK. Using a mid-wavelength infrared imaging device, the infrared thermal imaging of the PbSe FPA detector on the thermal radiation target of 350~450℃ was preliminarily demonstrated. This work lays the foundation for the subsequent development of high-density pixel PbSe FPA detectors.

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引用本文

陈岩松,任梓洋,徐翰纶,朱海明,王垚,吴惠桢. PbSe光电导焦平面阵列探测器[J].红外与毫米波学报,2022,41(6):980~986]. CHEN Yan-Song, REN Zi-Yang, XU Han-Lun, ZHU Hai-Ming, WANG Yao, WU Hui-Zhen. Photoconductive focal plane arrays infrared detector based on PbSe[J]. J. Infrared Millim. Waves,2022,41(6):980~986.]

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  • 收稿日期:2022-04-20
  • 最后修改日期:2022-11-17
  • 录用日期:2022-05-16
  • 在线发布日期: 2022-11-08
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