截止波长2.2μm的平面型延伸波长InGaAs探测器
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1.中国科学院上海技术物理研究所;2.中国科学院上海技术物理研究

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上海市优秀学术/技术带头人计划资助(21XD1404200);中国科学院重点部署项目(ZDRW-CN-2019-3);中国科学院联合基金(6141A01170106);上海市级科技重大专项(2019SHZDZX01);国家自然科学基金(62075229),国家自然科学基金(62175250).


Planar wavelength-extended In0.75Ga0.25As detector with 2.2-μm cut-off wavelength
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Shanghai Institute of Technical Physics

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    摘要:

    摘 要:采用闭管扩散的方法成功研制了截止波长2.2μm的平面型延伸波长InGaAs探测器芯片。在分子束外延法(MBE)生长的In0.75Al0.25As/ In0.75Ga0.25As/ In0.75Al0.25As外延材料上,采用砷化锌作为扩散掺杂源、SiNx作为扩散掩膜层实现了扩散成结。分析了扩散结深和载流子侧向收集宽度、I-V特性、光谱响应特性和探测率,结果表明:150K温度下,器件暗电流密度0.69nA/cm2@-10mV,响应截止波长和峰值波长分别为2.12μm和1.97μm,峰值响应率为1.29A/W,峰值量子效率达82%,峰值探测率为1.01×1012cmHz1/2/W。这些结果对后续进一步优化平面型延伸波长InGaAs焦平面探测器有重要的指导意义。 关键词:延伸波长;InAlAs/InGaAs;扩散;暗电流密度,量子效率 中文分类号:TN215 文献标识码:A

    Abstract:

    Abstract: Planar-type 2.2-μm wavelength-extended InGaAs photodetectors (PDs) using the sealed-ampoule diffusion method was reported. The zinc arsenide powder was used as the dopant source, which was driven into the cap of the In0.75Al0.25As/In0.75Ga0.25As/In0.75Al0.25As hetero structure materials grown by molecular beam epitaxy (MBE), using a SiNx as diffusion mask deposited by ICP-CVD. The junction depth, the lateral collection width of photogenerated carriers, the I-V characteristics, the spectral response and the detectivity of the detector at different temperatures were analyzed. The results indicate that the PD exhibits a low dark current density of 0.69×10?9A/cm2 at -10mV at 150K. The cutoff wavelength and peak wavelength were 2.12μm and 1.97μm. The peak detectivity, peak responsivity and quantum efficiency was 1.01×1012cm·Hz1/2/W, 1.29A/W and 82% respectively. These results suggest that the planar-type InGaAs can reach high performance. Key words-wavelength-extended;InAlAs/InGaAs;diffusion;dark current density;quantum efficiency PACS : TN215

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  • 收稿日期:2022-02-16
  • 最后修改日期:2022-04-26
  • 录用日期:2022-04-27
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