薄膜光学常数的原位测量
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1.中科院上海技术物理研究所;2.上海师范大学

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基金项目:

中国国家自然科学基金(11874376); 上海市科委基金(19DZ2293400, 19ZR1465900); 上海市科技重大专项(2019SHZDZX01); 中国科学院院长国际奖学金项目(2021PT0007)


On-site determination of optical constants for thin films
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Affiliation:

1.Shanghai Institute of Technical Physics;2.Shanghai Normal University;3.Shanghai Institute of Technical Physics, Cas

Fund Project:

National Natural Science Foundation of China (11874376); Shanghai Science and Technology Commission Foundations (19DZ2293400, 19ZR1465900); Shanghai Municipal Science and Technology Major Project (2019SHZDZX01); Chinese Academy of Sciences President’s International Fellowship Initiative (2021PT0007)

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    摘要:

    薄膜光学常数(折射率和消光系数)的精度直接影响设计和制作的光学器件的性能。 大多数光学常数的测量方法都比较复杂,不能应用于薄膜沉积过程中。 本文提出了一种薄膜光学常数的原位测量方法。 该方法通过监测沉积材料的透射率,可快速、准确地确定光学常数。 作为示例,我们利用该方法得到了高吸收材料Si、低吸收材料Ta2O5和超低吸收材料SiO2的近红外光学常数,它们分别为n=3.22, k=4.6×10-3, n=2.06, k=1.3×10-3和n= 1.46, k=6.6×10-5。 结果表明,这一方法适用于测定强、弱吸收材料的光学常数。 为现场精确确定光学常数提供了一种有效的方法,对高质量光学器件的设计和制作具有重要意义。

    Abstract:

    The optical constants (refractive index and extinction coefficient) accuracy of thin films directly affects the properties of designed and fabricated optical devices. Most of the determination methods of optical constants are complex and cannot be applied during the film depositing process. In this paper, an optical constants determination method of thin films on-site is proposed. By monitoring the transmittance of depositing materials, this method can rapidly and accurately determine the optical constants on-site. For demonstration, the near-infrared optical constants of high-absorption material Si, low-absorption material Ta2O5 and ultra-low-absorption material SiO2 are obtained as n=3.22, k=4.6×10-3, n=2.06, k=1.3×10-3 and n= 1.46, k=6.6×10-5 respectively by this method. It reveals that this method is suitable for determining both strong and weak absorption materials" optical constants. It provides an effective way for precisely determining optical constants on-site, which is meaningful for the design and fabrication of high-quality optical devices.

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  • 收稿日期:2022-02-14
  • 最后修改日期:2022-03-21
  • 录用日期:2022-03-23
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