甚长波碲镉汞红外焦平面探测器
DOI:
作者:
作者单位:

1.昆明物理研究所;2.中国人民解放军63963部队

作者简介:

通讯作者:

中图分类号:

TN215

基金项目:

红外专项项目(LZX20190305)


Very long wave HgCdTe infrared focal plane detector
Author:
Affiliation:

1.Kunming Institute of Physics;2.63963 Unit of the Chinese People'3.'4.s Liberation Army

Fund Project:

Infrared Special Project(LZX20190305)

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    采用砷离子注入p-on-n平面结技术制备了77K工作温度下截止波长分别为13.23μm和14.79μm,像元中心距为25μm的甚长波640×512探测器,并对其基本性能和暗电流进行了测试和分析。结果表明,对于截止波长为13.23μm甚长波640×512(25μm),器件量子效率为55%,NETD平均值为21.5mK,有效像元率为99.81%;对于截止波长为14.79μm甚长波640×512(25μm),器件量子效率为45%,NETD平均值为34.6mK,有效像元率为99.28%。这两个甚长波器件在液氮温度下的R0A分别为19.8Ω.cm2和1.56Ω.cm2,达到了“Rule07”经验表达式的预测值,器件噪声主要受散粒噪声限制,显示出了较好的器件性能。

    Abstract:

    Very long wave 640×512 FPAs with 25μm pixel pitch and cutoff wavelength of 13.23μm, 14.79μm respectively at 77K were prepared by arsenic ion implanted p-on-n planar junction technology. The basic performance and dark current of the FPAs are characterized and analyzed. The results show that the quantum efficiency of the VLWIR 640×512 FPAs with λc(77K)=13.23μm is 55%, the average NETD is 21.5mk, with an operability of 99.81%; The quantum efficiency of the VLWIR 640×512 FPAs with λc(77K)=14.79μm is 45%, the average NETD is 34.6mK, with an operability of 99.28%. The R0A figures of merit at liquid nitrogen temperature are 19.8Ω.cm2 and 1.56Ω.cm2 respectively, which reaches the predicted value of the "rule07" heuristic law, and the device noise is mainly limited by current shot noise. The results show that the performances of FPAs are at the state of the art.

    参考文献
    相似文献
    引证文献
引用本文
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2022-01-05
  • 最后修改日期:2022-02-08
  • 录用日期:2022-02-17
  • 在线发布日期:
  • 出版日期: