1.中国科学院半导体研究所, 集成光电国家重点实验室, 北京 100083;2.中国科学院大学材料科学与光电工程中心, 北京 100049;3.中国科学院 半导体研究所,光电子器件国家工程研究中心,北京 100083
国家电网公司科技项目(NO.5700-202058482A-0-0-00);国家重点研发计划(NO.2019YFB2203802)
1.State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Supported by Science and Technology Project of State Grid Corporation of China (No. 5700-202058482A-0-0-00), National Key Research and Development Program of China (No. 2019YFB2203802);