基于铌酸锂薄膜的Y波导集成调制器设计
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1.中国科学院半导体研究所, 集成光电国家重点实验室, 北京 100083;2.中国科学院大学材料科学与光电工程中心, 北京 100049;3.中国科学院 半导体研究所,光电子器件国家工程研究中心,北京 100083

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基金项目:

国家电网公司科技项目(NO.5700-202058482A-0-0-00);国家重点研发计划(NO.2019YFB2203802)


Design of a novel Y-junction electro-optic modulator based on thin film lithium niobite
Author:
Affiliation:

1.State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Fund Project:

Supported by Science and Technology Project of State Grid Corporation of China (No. 5700-202058482A-0-0-00), National Key Research and Development Program of China (No. 2019YFB2203802);

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    摘要:

    近年来,基于薄膜铌酸锂(TFLN)平台的高性能电光调制器以其小体积、低能量损耗等特点受到广泛关注。本文提出了一种新的具有垂直电极结构的Y波导铌酸锂薄膜电光调制器。研究了调制器的半波电压与缓冲层厚度之间的关系,优化了Y波导的设计参数,最后设计得到插入损耗<5dB, 半波电压<1.5V的高性能调制器。本文不仅为基于TFLN平台的小型化波导的设计和实现提供了思路,而且为制造高性能和多功能的电光调制器提供了实验依据。

    Abstract:

    In recent years, the high-performance electro-optic modulator based on the Thin-film lithium niobate (TFLN) platform has been receiving considerable attention due to the featuring small footprint and low energy loss. In this paper, a novel Y-junction electro-optic modulator with a vertical electrode structure was designed based on TFLN. The relationship between the low half-wave voltage and the buffer layer thickness for the novel modulator was investigated. Meanwhile, the design parameters of Y-junction were optimized, and found that the half-wave voltage is less than 1.5 V and the insertion loss is less than 5 dB. Finally, the Y-junction electro-optic modulator was fabricated. This study not only provides insights on the design and realization of compact footprint photonic waveguides in the TFLN platform but also, experimental evidence for the fabrication of electro-optic modulators with high-performance and multifunction.

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历史
  • 收稿日期:2021-08-16
  • 最后修改日期:2022-03-06
  • 录用日期:2021-09-17
  • 在线发布日期: 2022-02-28
  • 出版日期: