氧分压对脉冲激光沉积β-Ga2O3-δ薄膜光学性能的影响
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1.华东师范大学 物理与电子科学学院,材料科学系,纳光电集成与先进装备教育部工程研究中心,上海市极化材料多功能磁光光谱技术服务平台,上海 200241;2.山西大学 极端光学协同创新中心,山西 太原 030006;3.复旦大学 上海智能电子与系统研究院,上海 200433

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O484.1

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Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition
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1.Technical Center for Multifunctional Magneto-Optical Spectroscopy (Shanghai), Engineering Research Center of Nanophotonics & Advanced Instrument (Ministry of Education), Department of Materials, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China;2.Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China;3.Shanghai Institute of Intelligent Electronics & Systems, Fudan University, Shanghai 200433, China

Fund Project:

Supported by the National Key R&D Program of China ( 2018YFB0406500 and 2019YFB2203400); the Natural Science Foundation of China (91833303, 61974043, 62074058, 62090013 and 61974044); Projects of Science and Technology Commission of Shanghai Municipality ( 18JC1412400, 18YF1407200, 18YF1407000 and 19511120100); the Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning and Shanghai Pujiang Program (20PJ1403600).

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    摘要:

    在不同氧分压下,用脉冲激光沉积法在c-蓝宝石衬底上制备了高质量β-Ga2O3-δ薄膜。通过X-射线衍射、远红外反射光谱、X-射线光电子能谱和紫外-可见-近红外透射光谱系统地研究了β-Ga2O3-δ薄膜的晶格结构、化学计量比和光学性质。X-射线衍射分析表明,所有沉积的薄膜以(-201)晶向方向生长。透射光谱显示薄膜在255 nm以上的紫外-可见-近红外波段具有80%以上的高透明度,同时在255 nm附近有一个陡峭的吸收边。此外,利用Tauc-Lorentz (TL)色散函数模型和Tauc公式,我们提取了β-Ga2O3-δ薄膜的光学常数和光学直接带隙。更进一步,我们通过理论计算解释了氧气分压对β-Ga2O3-δ薄膜光学性质的影响。

    Abstract:

    High quality β-Ga2O3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga2O3-δ films are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc’s relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.

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李留猛,周斌,高立宸,姜凯,朱亮清,张金中,胡志高,褚君浩.氧分压对脉冲激光沉积β-Ga2O3-δ薄膜光学性能的影响[J].红外与毫米波学报,2022,41(1):279~284]. LI Liu-Meng, ZHOU Bin, GAO Li-Chen, JIANG Kai, ZHU Liang-Qing, ZHANG Jin-Zhong, HU Zhi-Gao, CHU Jun-Hao. Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition[J]. J. Infrared Millim. Waves,2022,41(1):279~284.]

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  • 收稿日期:2021-07-06
  • 最后修改日期:2022-01-17
  • 录用日期:2021-10-20
  • 在线发布日期: 2022-01-17
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