平面型InGaAs探测结构中p型杂质的二维扩散行为研究
作者:
作者单位:

1.上海理工大学 材料科学与工程学院,上海 200093;2.中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083;3.上海师范大学 数理学院,上海 200234;4.中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083

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TN215

基金项目:

国家自然科学基金(11574336, 11991063);中国科学院战略性先导科技专项(XDB43010200);上海市自然科学基金(18JC1420401, 19ZR1465700, 14ZR1446200)


SCM study on the 2D diffusion behavior of p-type impurities in planar InGaAs detectors
Author:
Affiliation:

1.School of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;2.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;3.Mathematics and Science College, Shanghai Normal University, Shanghai 200234, China;4.State Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Fund Project:

Supported by the National Natural Science Foundation of China (11574336, 11991063), The Strategic Priority Research Program of Chinese Acdemy of Sciences (XD43010200), STCSM (18JC1420401, 19ZR1465700, 14ZR1446200)

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    摘要:

    在平面型InGaAs P-i-N短波红外探测结构中,p型杂质在材料中纵向和横向的扩散是决定pn结位置及其光电性能的主要因素,本文采用扫描电容显微方法(SCM)获得了扩散成结InGaAs/InAlAs像元剖面的二维载流子分布,从而实现对不同扩散条件下pn电场结的精确定位和分析。此外,对于InGaAs/InP探测器,SCM测量揭示了Zn杂质在各功能层中扩散行为的显著差异。在InGaAs吸收区中,Zn的侧向扩散速度是深度方向的3.3倍,远高于其在n-InP帽层中0.67的侧向与深度扩散比,这将对光敏元的边缘电容以及暗电流特性产生影响。

    Abstract:

    Scanning Capacitance Microscopy (SCM) was applied to obtain the 2-dimensional carrier distribution on the cross-section of planar type InGaAs/InAlAs pixels. The profile of pn junction in the device structure was able to be depicted with high space resolution. Besides, for InGaAs/InP detector, the SCM study helps to disclose the distinct diffusion behavior of p-type impurities in different functional layers. The lateral diffusion speed of zinc in InGaAs absorption layer was decided as 3.3 times than that in the depth direction, which is significantly higher than the lateral to depth ratio of 0.67 in the n-InP cap layer, this could affect both the capacitance and dark current properties of the diode pixels.

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张帅君,李天信,王文静,李菊柱,邵秀梅,李雪,郑时有,庞越鹏,夏辉.平面型InGaAs探测结构中p型杂质的二维扩散行为研究[J].红外与毫米波学报,2022,41(1):262~268]. ZHANG Shuai-Jun, LI Tian-Xin, WANG Wen-Jing, LI Ju-Zhu, SHAO Xiu-Mei, LI Xue, ZHENG Shi-You, PANG Yue-Peng, XIA Hui. SCM study on the 2D diffusion behavior of p-type impurities in planar InGaAs detectors[J]. J. Infrared Millim. Waves,2022,41(1):262~268.]

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  • 收稿日期:2021-03-11
  • 最后修改日期:2022-01-17
  • 录用日期:2021-04-16
  • 在线发布日期: 2022-01-17
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