具有优化倍增层InAlAs / InGaAs雪崩光电二极管
作者:
作者单位:

1.中国科学技术大学 纳米技术与纳米仿生学院,安徽 合肥 230026;2.中国科学院苏州纳米技术与纳米仿生研究所 纳米器件与应用重点实验室,江苏 苏州 215123

作者简介:

E-mail: sllu2008@sinano.ac.cn

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中图分类号:

O436

基金项目:


InAlAs/InGaAs avalanche photodiode with an optimized multiplication layer
Author:
Affiliation:

1.Institute of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China;2.Key Laboratory of Nano-devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China

Fund Project:

Supported by the National High Technology Research and Development Program of China (2018YFB2003305), the Key R&D Program of Jiangsu Province ( BE2018005), the Science and Technology Service Network Initiative of the Chinese Academy of Sciences (KFJ-STS-ZDTP-086), the Support From SINANO (Y8AAQ11003), Natural Science Foundation of Jiangsu Province (BK20180252)Foundation items:GU Yu-Qiang(1995-),male, Taizhou China. Master, Research area focus on performance simulation and process preparation of avalanche photodiode. E-mail:yqgu2019@sinano.ac.cn

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    摘要:

    通过优化倍增层的厚度,研究了InAlAs/InGaAs雪崩光电二极管增益带宽积和暗电流之间的关系。利用仿真计算得出200 nm厚的倍增层能够改善增益带宽积并降低暗电流。制成的InAlAs/InGaAs 雪崩光电二极管性能优异,与计算趋势一致。在获得0.85 A/W的高响应和155 GHz的增益带宽积的同时,器件暗电流低于19 nA。这项研究对雪崩光电二极管在未来高速传输的应用具有重要意义。

    Abstract:

    In this paper, the trade-off between gain-bandwidth product (GBP) and dark current of an InAlAs/InGaAs avalanche photodiode (APD) was studied by optimizing multiplication layer. An optimized multiplication layer with 200 nm was proposed to improve the GBP and reduce the dark current. The fabricated InAlAs/InGaAs APD shows an excellent performance which is consistent with the calculated results. A high responsivity of 0.85 A/W (M=1) at 1.55 μm and a high GBP of 155 GHz was achieved, whereas the dark current is as low as 19 nA at 0.9 Vb. This study is significant to the future high-speed transmission application of the avalanche photodiodes.

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引用本文

顾宇强,谭明,吴渊渊,卢建娅,李雪飞,陆书龙.具有优化倍增层InAlAs / InGaAs雪崩光电二极管[J].红外与毫米波学报,2021,40(6):715~720]. GU Yu-Qiang, TAN Ming, WU Yuan-Yuan, LU Jian-Ya, LI Xue-Fei, LU Shu-Long. InAlAs/InGaAs avalanche photodiode with an optimized multiplication layer[J]. J. Infrared Millim. Waves,2021,40(6):715~720.]

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  • 收稿日期:2021-03-04
  • 最后修改日期:2021-12-01
  • 录用日期:2021-04-09
  • 在线发布日期: 2021-11-29
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