940 nm VCSEL高折射率对比度亚波长光栅反射镜的设计
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长春理工大学 高功率半导体激光国家重点实验室,吉林 长春 130022

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O472;+.8

基金项目:

国家自然科学基金(11474038),吉林省科技发展计划项目(20200401073GX)


Design of high refractive index contrast subwavelength grating reflector for 940 nmVCSEL
Author:
Affiliation:

National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China

Fund Project:

Supported by National Natural Science Foundation of China (11474038),Jilin Science and Technology Development Plan of China (20200401073GX)

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    摘要:

    研究了一种940 nm GaAs基VCSEL的高折射率对比度亚波长光栅反射镜(HCG),采用GaAs/AlOx光栅结构,讨论了TE偏振时光栅结构中各参数对反射光谱的作用规律,分析TE、TM不同偏振时反射镜的结构特点,及形貌误差对高反射带的影响。设计的TE-HCG的高反射带中心为940 nm,在0.888~0.985 μm波长范围内,TE波反射率大于99.5%,TM波反射率低于90%,高反射带宽97 nm,Δλ/λ0>10%。该反射镜可以与VCSEL采用一次性外延生长技术制作,且具有结构简单,制作容差大,且偏振稳定的优势,不仅有利于改善器件性能,且大大降低VCSEL的制作难度和成本。

    Abstract:

    A high-refractive-index contrast subwavelength grating (HCG) for 940 nm GaAs-based VCSEL is reported. The reflector is composed of GaAs and AlOx. The effects of the grating parameters of TE-HCG on refractivity are discussed in detail. And the structural characteristics of TE-HCG and TM-HCG are analyzed, especially the influence of their topography errors on the high reflection band. The 940 nm TE-HCG has a large reflection bandwidth of up to 97 nm with its reflectivity for TE incident light more than 99.5%, and the ratio of Ratio of high reflection band to central wavelength is more than 10%. But for TM incident light its reflectivity is less than 90%. It is worth mentioning that the VCSEL with such a TE-HCG can be prepared by one-time epitaxial growth technology, which helps to improve the performance of the device. Furthermore, it greatly reduces the manufacturing difficulty and cost of a VCSEL.

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罗妍,郝永芹,晏长岭.940 nm VCSEL高折射率对比度亚波长光栅反射镜的设计[J].红外与毫米波学报,2021,40(6):834~839]. LUO Yan, HAO Yong-Qin, YAN Chang-Ling. Design of high refractive index contrast subwavelength grating reflector for 940 nmVCSEL[J]. J. Infrared Millim. Waves,2021,40(6):834~839.]

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  • 收稿日期:2020-11-05
  • 最后修改日期:2021-08-05
  • 录用日期:2020-12-21
  • 在线发布日期: 2021-07-30
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