基于T形阳极GaAs肖特基二极管薄膜集成电路工艺的664 GHz次谐波混频器
作者:
作者单位:

1.南京电子器件研究所 微波毫米波单片集成和模块电路重点实验室,江苏 南京 210016;2.南京中电芯谷高频器件产业技术研究院有限公司,江苏 南京 210016;3.南京安太芯电子有限公司,江苏 南京 210016

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中图分类号:

TN304.2;TN315+.3;TN773

基金项目:


664 GHz sub harmonic mixer based on “T” anode GaAs SBD membrane circuit
Author:
Affiliation:

1.Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China;2.Nanjing Chip Valley Industrial Technology Institute, Nanjing 210016, China;3.Nanjing Antaixin Electornic Co. Ltd., Nanjing 210016, China

Fund Project:

Supported by the national key R&D program of China (2018YFF0109301)

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    摘要:

    报道了用于冰云探测的基于0.5 μm T形阳极砷化镓肖特基二极管薄膜集成电路工艺664 GHz次谐波混频器。为降低器件寄生参数,提升太赫兹频段电路性能,设计并分析了了T形阳极GaAs SBD器件结构,开发了厚度仅5 μm的薄膜电路工艺。混频器芯片组装成664 GHz接收模块,经测试室温下664 GHz最小双边带变频损耗达到 9.9 dB。

    Abstract:

    664 GHz sub harmonic mixer for ice cloud detection was designed and fabricated, based on 0.5 μm “T” anode GaAs SBD membrane integrated process with thickness of 5 μm. Parasitic parameters of “T” anode design were analyzed and membrane process was developed to improve high frequency performance. The mixer was characterized in 664 GHz receiver setup. Double side band conversion loss of the mixer was 9.9 dB at 664 GHz room temperature.

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牛斌,钱骏,范道雨,王元庆,梅亮,戴俊杰,林罡,周明,陈堂胜.基于T形阳极GaAs肖特基二极管薄膜集成电路工艺的664 GHz次谐波混频器[J].红外与毫米波学报,2021,40(5):634~637]. NIU Bin, QIAN Jun, FAN Dao-Yu, WANG Yuan-Qing, MEI Liang, DAI Jun-Jie, LIN Gang, ZHOU Ming, CHEN Tang-Sheng.664 GHz sub harmonic mixer based on “T” anode GaAs SBD membrane circuit[J]. J. Infrared Millim. Waves,2021,40(5):634~637.]

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历史
  • 收稿日期:2020-10-22
  • 最后修改日期:2021-09-04
  • 录用日期:2021-01-26
  • 在线发布日期: 2021-09-03
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