CMOS兼容的中红外多通道光子晶体传感器
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中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室上海 200050

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O799,O439

基金项目:

上海市青年科技英才扬帆计划


CMOS compatible multichannel mid-infrared photonic crystal sensor
Author:
Affiliation:

Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Fund Project:

the Shanghai Sailing Program 18YF1428200 18YF1428100Supported by the Shanghai Sailing Program (No.18YF1428200, No.18YF1428100)

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    摘要:

    我们提出了一种基于光子晶体的二维多通道光学化学传感器。该器件由中心波长为3.3 μm的四个腔组成,各通道工作波长间隔为10 nm。该传感器采用800 nm厚的绝缘体上硅材料,可利用标准CMOS技术加工。我们通过三维时差有限差分法对微腔结构的光学特性进行模拟。每个通道的传输效率为39%,通道之间的传输效率不一致性小于0.25dB。该传感器的功能为检测四氯化碳和苯溶液浓度,其灵敏度为209.2 nm/RIU。

    Abstract:

    We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal (PhC) slab. The device is composed of four cavities with a center wavelength at 3.3μm, and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain (FDTD) method. The transmittance of each channel is about 39%, with non-uniformity of transmittance across channels less than 0.25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solutions, and shows a sensitivity of 209.2nm/RIU.

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周易,王磊,李军,杨雪雷,甘峰源,赵瑛璇,仇超,李伟. CMOS兼容的中红外多通道光子晶体传感器[J].红外与毫米波学报,2020,39(3):279~283]. ZHOU Yi, WANG Lei, LI Jun, YANG Xue-Lei, GAN Feng-Yuan, ZHAO Ying-Xuan, QIU Chao, LI Wei. CMOS compatible multichannel mid-infrared photonic crystal sensor[J]. J. Infrared Millim. Waves,2020,39(3):279~283.]

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  • 收稿日期:2019-11-12
  • 最后修改日期:2020-03-28
  • 录用日期:2020-02-08
  • 在线发布日期: 2020-03-18
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