1.中国科学院微电子研究所 集成电路先导工艺研发中心,北京 100029;2.中国科学院大学,北京 100049;3.无锡物联网创新中心有限公司，江苏 无锡，214028
国家自然科学基金 61601455 61874137;北京市科委重点研发计划 Z191100010618005国家自然科学基金（61601455, 61874137），北京市科委重点研发计划（Z191100010618005）
1.Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China;2.University of Chinese Academy of Sciences, Beijing 100049, China;3.Wuxi Innovation Center for Internet of Things, Wuxi 214028，China
National Natural Science Foundation of China 61601455 61874137;the Key R&D Program of Beijing Municipal Science and Technology Commission Z191100010618005Supported by National Natural Science Foundation of China (61601455, 61874137)， the Key R&D Program of Beijing Municipal Science and Technology Commission（Z191100010618005）
刘超,侯影,傅剑宇,刘瑞文,魏德波,陈大鹏.一种二极管型红外热探测器热学参数的电学等效测试方法[J].红外与毫米波学报,2019,38(6):798~804]. LIU Chao, HOU Ying, FU Jian-Yu, LIU Rui-Wen, WEI De-Bo, CHEN Da-Peng. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector[J]. J. Infrared Millim. Waves,2019,38(6):798~804.]
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