纳米VO2薄膜的制备及其可见光透过率的改善
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TB381 TB43

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国家自然科学基金资助项目(60477040)


PREPARATION OF VO2 FILMS WITH NANOSTRUCTURE AND IMPROVEMENT ON ITS VISIBLE TRANSMITTANCE
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    摘要:

    阐述了一种纳米VO2薄膜材料新型结构的制备方法.先用反应离子束溅射和退火工艺在玻璃基底上制备出具有相变特性的薄膜.HRTEM及KRD显示这种薄膜含有纳米量级的VO2颗粒,四探针测试电阻温度关系表明该类材料相变温度已经靠近室温,变化温度下测得的红外透过曲线表明该材料在相变前后具有良好的红外光开关特性.再针对该薄膜材料较低的可见光透过率,提出SiO2减反膜设计,取得了较好的实验效果.为开展VO2薄膜材料在智能窗类光电产品的应用研究打下了基础.

    Abstract:

    A method to deposit a new configuration of thermochromic VO2 films material was described, By ion beam sputtering and annealing in reductive ambient, VO2 films grown onto the glass substrate show an abrupt phase transfomation. Nanometer-scale VO2 grains are found under HRTEM and XRD observation. Four-point-test shows that the films phase transition temperature has shifted towards room temperature. The transmittances measured on different temperatures also reveal that the material owns excellent switching response to infrared light at critical transition temperature. A design of SiO2 anti-refection coating is used to improve low visible transmittance of the films, which obtains a satisfying result in experiments. It is a basic study in the applications of VO2 films to smart windows.

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沈楠 李毅 易新建.纳米VO2薄膜的制备及其可见光透过率的改善[J].红外与毫米波学报,2006,25(3):199~202]. SHEN Nan, LI Yi, YI Xin-jian. PREPARATION OF VO2 FILMS WITH NANOSTRUCTURE AND IMPROVEMENT ON ITS VISIBLE TRANSMITTANCE[J]. J. Infrared Millim. Waves,2006,25(3):199~202.]

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  • 收稿日期:2005-11-03
  • 最后修改日期:2006-02-27
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