A new and rapid heat treatment process for fabricating lead zirconate titanate, Pb(Zr 0.52 Ti 0.48 )O 3(PZT), ferroelectric thin films was developed. The main equipment of this heat treatment process is termed caterpillar furnace. The furnace is composed of three parts, including preheating, heating and cooling. The precursor solution were prepared by using a modified sol gel process, in which solid precursors of PZT were prepared through reduced pressure distillation first, and then the precursor was dissolved in 2 methoxyethanol(2 MOE) to form the sols for the spin coating deposition. The precursor was investigated by DSC TG, and the PZT thin film was investigated by XRD. XRD analysis shows that the thin film possesses single phase perovskite type structure. A dielectric constant and loss tangent of thin film were 235 and 0.02 at 10KHz, respectively. The capacitance voltage(C V) and Hysteresis loops of PZT films show that the films possess fine ferroelectric properties.