Si离子注入和退火温度对GaN黄光的影响
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TN304.91

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国家自然科学基金 (批准号 60 0 760 0 3 )资助项目~~


EFFECT OF Si ION IMPLANTATION IN GaN AND ITS THERMAL ANNEALING TEMPERATURE ON YELLOW LUMINESCENCE
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    摘要:

    对光致发光谱中无黄光和有强黄光的两组GaN样品作了Si离子注入 ,研究了Si离子注入及退火温度对其黄光的影响 .当退火温度升高时 ,不管是哪一组样品 ,其黄光强度和黄光强度与带边发光带强度之比都是增强的 .无黄光的GaN样品在注入Si离子并经退火后出现明显的黄光 ;而有强黄光的GaN样品经相同处理后 ,其黄光强度较原生样品大大降低 .实验结果表明离子注入加上适当退火会在GaN中引入与黄光有关的深受主缺陷从而使黄光强度增加 ,此外 ,在离子注入过程中GaN表面不仅可以吸附离子注入引入的点缺陷 ,而且还能够吸附GaN中原有的与黄光有关的点缺陷 ,这种吸附作用随离子注入剂量增加而变强 .

    Abstract:

    The influence of Si ion implantation in GaN and post implantation thermal annealing on yellow luminescence(YL) by using two types of GaN samples with strong YL and without YL were studied. As the thermal annealing temperatures increased, the YL intensity and the intensity ratio of YL to near band edge(BE) emission ( I Y? I BE ) for both types of implanted GaN samples enhanced. After Si ion implantation and post implantation thermal annealing, the YL of the GaN sample with strong YL decreased markedly, while that of the GaN sample without YL increased markedly. These experimental results show that the ion implantation together with appropriate post annealing can produce YL related deep acceptor defects, and can increase YL intensity, besides, the GaN surface can adsorb two kinds of point defects, one is caused from ion implantation, another is native and related to YL. This adsorption action of GaN surface becomes strong as ion implantation dose increases.

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张纪才,戴伦,秦国刚. Si离子注入和退火温度对GaN黄光的影响[J].红外与毫米波学报,2002,21(5):342~346]. ZHANG Ji Cai ** DAI Lun QIN Guo Gang. EFFECT OF Si ION IMPLANTATION IN GaN AND ITS THERMAL ANNEALING TEMPERATURE ON YELLOW LUMINESCENCE[J]. J. Infrared Millim. Waves,2002,21(5):342~346.]

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  • 最后修改日期:2002-03-11
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