Abstract:Initialization parameters used in infrared optical thin film monitoring system, including input coatings, monitoring mode, monitoring wavelength, material coefficients, slice options,etc.,were listed in forms of dialog control. When the user inputs these parameters, the application programme can automatically check these parameters' validity to ensure that the contents the user inputs are correct, thus, it supplies a kind of security mechanism for subsequent automatic control of optical thin film process. The corresponding algorithm was also given in this paper.