1kHz femtosecond laser was used to induce crystallization on amorphous Si film. Raman spectra show that the crystallization region depended critically on the laser fluence and profile. Furthermore, a textured surface with a mass of finegrained crystalline Si was observed through SEM. This structure might result from the explosive crystallization and epitaxial growth of Si nucleation on the interface of liquidsolid Si. Due to the simultaneous process of crystallization and surface texturing, this laser treated region enhanced its absorbance in the visible and infrared band.
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戴晔,何敏,阎晓娜,马国宏.近红外飞秒激光诱导非晶硅薄膜的晶化[J].红外与毫米波学报,2011,30(3):202~205]. DAI Ye, HE Min, YAN Xiao-Na, MA GuoHong. Crystallization of amorphous silicon film induced by a near infrared femtosecond laser[J]. J. Infrared Millim. Waves,2011,30(3):202~205.]