Brief Analysis of Laser Scratching Technology for InSb Detector Chip
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Abstract:
A system containing an optical platform and a galvanometer is set up for InSb detector chips on the basis of an ultraviolet picosecond laser. By fixing the laser pulse repetition frequency, different technological conditions such as low-energy multi-knife- number and high-energy less-knife-number are discussed and the technological conditions suitable for laser scribing of InSb detector chips are obtained. The results show that by using these technological conditions, both heat effect and edge breakage meet the requirements of the project.
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lijiafa, CAO Li-ya, ZHANG Zi-chen, et al. Brief Analysis of Laser Scratching Technology for InSb Detector Chip[J]. Infrared,2018,39(12):16~19