X-ray morphology testing is a non-destructive testing method for detecting the integrity of the crystal structure of samples. Surface morphology testing of tellurium zinc cadmium (111) wafers was conducted using a high-resolution digital X-ray morphometer, and the quality of tellurium zinc cadmium crystals was evaluated by defect form and density. After extensive data analysis, five common defects in tellurium zinc cadmium crystals have been identified: scratches, voids, small angle grain boundaries, twinning and impurities. Based on specific processes, the reasons for the formation of 5 types of defects were explained and analyzed, and constructive suggestions were put forward for the growth and processing technology of tellurium zinc cadmium crystals, which is conducive to obtaining high-quality substrate materials and improving the quality of epitaxial tellurium cadmium mercury films.