Diameter Controlling of Large Diameter InSb Crystal
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    Abstract:

    To obtain high quality InSb crystals, a precision diameter-constant control technology is required in the growth process of large size InSb crystals. The principle and method for controlling the diameter of a crystal during its growth by using the Czochralski Method are presented. The factors, such as temperature and time delay, which have influence on diameter-constant control are analyzed. The precision diameter-constant control is implemented by using a computer aided method in the growth process of large size InSb crystals. The resulting InSb crystal with a diameter of 3in shows its smooth surface from the shoulder. Its dislocation density is less than 10/cm^2.

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Wang Zhifang, Wang yan-hua, Chen Yuanrui, et al. Diameter Controlling of Large Diameter InSb Crystal[J]. Infrared,2011,32(1):27~30

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