ZnS红外窗口的电磁屏蔽设计及试验验证
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Electromagnetic Shielding Design and Experimental Verification of ZnS Infrared Window
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    摘要:

    通过理论计算分析了金属网栅的电磁屏蔽特性与红外透过率之间的关系,发现金属网栅的电学特性与光学特性是相背离的。为满足镀金属网栅后光学镜片的透过率降幅小于等于5%、屏蔽效能大于30 dB (频率范围为14 kHz~18 GHz)的要求,首先通过理论计算选用线宽为10 μm、周期单元的长度和宽度均为500 μm、膜层厚度为1 μm的金属网栅(Ni-Ag)。然后采用直流磁控溅射镀制技术在直径为100 mm的硫化锌基片表面成膜。经过曝光、显影、坚膜、腐蚀、剥离等工艺,获得了镀Ni-Ag频率选择表面(Frequency Selective Surface, FSS)网栅的红外窗口样片。最后对红外窗口样片进行了透过率和屏蔽效能测试。测试结果满足设计要求。该计算数据可用于预估光学窗口的电磁屏蔽性能,为后续的设计工作提供参考。

    Abstract:

    The relationship between the electromagnetic shielding characteristics and the infrared transmittance of the metal grid is analyzed through theoretical calculation. It is found that the electrical characteristics of the metal grid are contrary to the optical characteristics. In order to ensure that the transmittance of the optical lens decreases by less than or equal to 5% and the shielding effectiveness is greater than 30 dB (frequency range: 14 kHz-18 GHz) after metal grid plating, it was first found through theoretical calculation that selecting a metal mesh (Ni-Ag) with a line width of 10 m, a period unit length and width of 500 μm, and a film thickness of 1 μm can meet the requirements. Then, using DC magnetron sputtering technology, the surface of the Zinc sulfide substrate with a diameter of 100 mm was filmed. After exposure, development, hardening, corrosion, stripping and other processes, the infrared window sample with Ni-Ag frequency selective surface (FSS) grid plating was finally obtained. Finally, the infrared window sample was tested for transmittance and shielding effectiveness. The test results met the design requirements. The calculated data can be used to predict the electromagnetic shielding performance of the optical window and provide a reference for the subsequent design work.

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贲畅,杜叶宣,闯家亮,等. ZnS红外窗口的电磁屏蔽设计及试验验证[J].红外,2023,44(7):8-14.

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