大尺寸锑化铟晶体生长等径技术研究
DOI:
CSTR:
作者:
作者单位:

作者简介:

通讯作者:

中图分类号:

基金项目:


Diameter Controlling of Large Diameter InSb Crystal
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    为了获得高质量的晶体,需要解决大尺寸锑化铟晶体生长过程中的精确等径控制问题。阐述了采用提拉法生长晶体 时的直径控制原理及方法,分析了影响等径控制的温度与时滞因素,并采用计算机辅助控制方法解决了大尺寸锑化铟晶体生长过程中 的精确等径控制问题。生长出的3in锑化铟晶体的生长条纹不明显,位错密度小于10个/cm^2。

    Abstract:

    To obtain high quality InSb crystals, a precision diameter-constant control technology is required in the growth process of large size InSb crystals. The principle and method for controlling the diameter of a crystal during its growth by using the Czochralski Method are presented. The factors, such as temperature and time delay, which have influence on diameter-constant control are analyzed. The precision diameter-constant control is implemented by using a computer aided method in the growth process of large size InSb crystals. The resulting InSb crystal with a diameter of 3in shows its smooth surface from the shoulder. Its dislocation density is less than 10/cm^2.

    参考文献
    相似文献
    引证文献
引用本文

王志芳,王燕华,陈元瑞,等.大尺寸锑化铟晶体生长等径技术研究[J].红外,2011,32(1):27-30.

复制
相关视频

分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
文章二维码