| 轴跳动激光相干测量技术研究 |
| 投稿时间：2017-07-25 修订日期：2017-08-13 点此下载全文 |
| 引用本文：孙士钦,戴梦萍.轴跳动激光相干测量技术研究[J].红外,2017,38(11):34~38 |
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| 中文摘要:转轴的圆跳动对机床的加工性能具有重要影
响。为了满足实时在线的高精度测量需求，提出了一种新颖高效
的轴跳动激光相干测量技术。该技术采用稳定可靠的基于塞曼效应的He-Ne激光器作为
光源，具有灵敏度高、输出信噪比高、精
度高、探测目标作用距离远等优点。另外，通过光纤传输，其测量
灵活性和抗干扰性得到了进一步提高，可以满足实时在线的远距离测量需求。实验
结果表明，该系统的测量不确定度小于0.1%。 |
| 中文关键词:圆跳动 塞曼效应 激光外差干涉 光纤 不确定度 |
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| Research on Laser Interference Measurement of Shaft Runout |
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| Abstract:Shaft runout has an important influence on
the machining performance of machine tools. To meet the requirements
of high precision, real-time and on-line shaft runout measurement, a
novel efficient laser coherence technique for shaft runout measurement
is proposed. Because of the use of a stable and reliable He-Ne laser
based on Zeeman effect as the light source, the technique has the
advantages of high sensitivity, high signal-to-noise ratio, high
accuracy and long detection range. In addition, with the transmission by
optical fiber, the flexibility and anti-interference of measurement are
further improved. The demand of real-time and online long range measurement
can be satisfied. The experimental result shows that the measurement
uncertainty of this system is less than 0.1%. |
| keywords:runout Zeeman effect laser heterodyne interferometry optical fiber transmission |
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