大面阵红外探测器与低温冷平台集成后的应变测试研究
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中国科学院上海技术物理研究所传感技术国家重点实验室,中国科学院上海技术物理研究所传感技术国家重点实验室,中国科学院上海技术物理研究所传感技术国家重点实验室

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TN215

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Test Study of Strain after Integration of Large Scale Infrared Detector Chip into Cryogenic Cold Platformat at Low Temperature
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State Key Laboratory of Transducer Technology,Shanghai Institute ofTechnical Physics,Chinese Academy of Sciences,Shanghai,China University of Chinese Academy of Sciences, Beijing,China,State Key Laboratory of Transducer Technology,Shanghai Institute ofTechnical Physics,Chinese Academy of Sciences,Shanghai,China University of Chinese Academy of Sciences, Beijing,China,State Key Laboratory of Transducer Technology,Shanghai Institute ofTechnical Physics,Chinese Academy of Sciences,Shanghai,China University of Chinese Academy of Sciences, Beijing,China

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    摘要:

    大面阵红外探测器是红外遥感仪器的核心元件。该类探测器大多由小规模面阵探测器拼接组成,与杜瓦低温冷平台集成后形成杜瓦组件。探测器在杜瓦低温冷平台上安装集成后的应力状态是影响芯片性能和寿命的关键因素。测试了低温时探测器在自由状态下和被安装在杜瓦组件内应变片的热输出,再利用两者的差值表征了探测器与杜瓦低温冷平台集成后的额外应变。以2000×512探测器组件为例,进行了测试验证分析,结果表明该方法可行。

    Abstract:

    Large area array infrared detectors are the core components in infrared remote sensing instruments. Most of them are composed of spliced small-scale area array detectors and are integrated on Dewar cold platforms to form Dewar assemblies. The stress state of a detector after being integrated on the Dewar cold platform is a key factor affecting the performance and lifetime of the chip. The thermal output of a strain gage when the detector is both in the free state and in the Dewar is tested at low temperature. The difference between the two values is used to characterize the extra strain after the detector is integrated with the Dewar cold platform. Taking a 2000×512 detector assembly as an example, the test verification and analysis are carried out. The result shows that this method is feasible.

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夏晨希,孙闻,王小坤.大面阵红外探测器与低温冷平台集成后的应变测试研究[J].红外,2017,38(8):23-26.

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