| 用于红外焦平面探测器的2.95～5.05 μm带通滤光膜 |
| 投稿时间：2023-03-20 修订日期：2023-03-28 点此下载全文 |
| 引用本文：岳威,王栩榕,韩隆,韩永昶,张阔,刘连泽,李熙韬.用于红外焦平面探测器的2.95～5.05 μm带通滤光膜[J].红外,2023,44(9):1~7 |
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| 基金项目:固体激光技术国家重点实验室基金项目 |
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| 中文摘要:中波红外焦平面探测器因在红外制导导弹、红外夜视仪等军事领域的重要性而被广泛关注，其中带通滤光膜具有滤除杂散光和保护探测器的作用。本研究的目的是针对中波红外焦平面探测器滤光膜的关键技术问题，通过分析、选材、优化等方法，制备出性能良好的中波红外带通滤光膜。以Ge为高折射率材料和基底，以SiO为低折射率材料，设计了带通膜系结构。不仅实现了在0°入射角下对2.95～5.05 μm波段大于92%的高透过率、通带宽度优于3.7～4.8 μm的常规应用，而且对2.95～5.05 μm之外的其它波段也能达到良好的截止效果。经测试，其光洁度、牢固性等各方面性能良好，可以很好地应用于中波红外焦平面探测器。 |
| 中文关键词:中波红外 带通滤光膜 透过率 薄膜制备 锗 |
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| 2.95－5.05 μm Bandpass Filter Film for Infrared Focal Plane Detectors |
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| Abstract:Mid-wave infrared focal plane detectors have been widely concerned because of their importance in military fields such as infrared guided missiles and infrared night vision devices, where the bandpass filter film has the function of filtering stray light and protecting detectors. The purpose of this study is to prepare high-performance bandpass filter film for mid-wave infrared focal plane detectors through analysis, material selection and optimization, aiming at the key technical problems of mid-infrared focal plane detector filter film. With Ge as the high refractive index material and substrate and SiO as the low refractive index material, the band-pass film system structure is designed, which not only realizes the high transmittance of 2.95－5.05 μm band greater than 92% and the passband width is better than 3.7－4.8 μm at 0° incidence angle. Moreover, it can achieve good cutoff effect for other bands except 2.95－5.05 μm. The test results show that it has good properties such as smoothness, solidity and so on. Therefore, the filter film can be well applied to mid-wave infrared focal plane detectors. |
| keywords:mid-wave infrared band-pass filter transmittance thin film preparation Ge |
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