| 用于VCSEL的Si基零对比度光栅反射镜研究 |
| 投稿时间：2022-09-09 修订日期：2022-09-22 点此下载全文 |
| 引用本文：郭帅,晏长岭,方铉,郝永芹.用于VCSEL的Si基零对比度光栅反射镜研究[J].红外,2022,43(12):30~36 |
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| 基金项目:国家自然科学基金项目(11474038)；吉林省科技发展计划项目(20200401073GX) |
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| 中文摘要:利用严格耦合波理论和时域有限差分方法设计了一种应用于940 nm垂直腔面发射激光器的Si基零折射率对比度光栅反射镜。对零对比度亚波长光栅(Zero-index-Contrast subwavelength Grating, ZCG)的高反射特性进行了研究，分析了ZCG实现宽带高反射的条件。此外，讨论了光栅结构参数对反射性能的影响并计算了制作公差，模拟分析了ZCG尺寸与垂直腔面发射激光器(Vertical-Cavity Surface-Emitting Laser, VCSEL)氧化孔径尺寸对镜面损耗的影响。所设计的ZCG带宽可达280 nm, Δλ/λ0=29.8%。该反射镜可以替代VCSEL中传统的分布式布拉格反射镜，降低了工艺难度和生长成本，同时有利于VCSEL与其他Si基光电子器件的集成。 |
| 中文关键词:垂直腔面发射激光器 零折射率对比度光栅 严格耦合波理论 时域有限差分 |
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| tudy on Si-Based Zero-Contrast Grating Reflector for VCSEL |
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| Abstract:A silicon-based zero refractive index grating (ZCG) reflector for 940 nm vertical cavity surface emitting laser is designed by using strict coupled wave theory and time-domain finite difference method. The high reflection characteristics of ZCG are investigated, and the conditions for achieving broadband high reflection are analyzed. In addition, the effect of grating structure parameters on reflection performance is discussed and fabrication tolerances are calculated, and the effect of ZCG size and VCSEL oxide aperture size on mirror loss is simulated. The designed ZCG with a bandwidth of 280 nm, Δλ/λ0=29.8%, can replace the conventional distributed Bragg reflector in VCSELs, reduce the process difficulty and growth cost, and facilitate the integration of VCSELs with other Si-based optoelectronic devices. |
| keywords:vertical cavity surface emitting laser zero-contrast subwavelength grating rigorous coupled-wave analysis time-domain finite-difference |
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