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Ⅱ类超晶格长波红外探测器研究进展
投稿时间:2020-09-23  修订日期:2020-10-08  点此下载全文
引用本文:邢伟荣,刘铭,温涛,周朋,胡雨农.Ⅱ类超晶格长波红外探测器研究进展[J].红外,2021,42(3):1~5
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作者单位E-mail
邢伟荣 中电科光电科技有限公司 xingwog@163.com 
刘铭 中电科光电科技有限公司  
温涛 中电科光电科技有限公司  
周朋 中电科光电科技有限公司  
胡雨农 中电科光电科技有限公司  
中文摘要:由于具有带隙可调、电子有效质量大、俄歇复合率低等特点,Ⅱ类超晶格在长波红外和甚长波红外探测方面具有独特优势。介绍了长波超晶格探测器制备方面的研究进展,包括能带结构设计、表面缺陷控制、周期结构控制和表面钝化。最后报道了320×256长波超晶格焦平面阵列及其测试性能。结果表明,在77 K工作温度下,该阵列的截止波长为9.6 μm,平均峰值探测率D*为7×1010 cm·Hz1/2/W,噪声等效温差 (Noise Equivalent Temperature Difference, NETD)为34 mK,响应非均匀性为7%。
中文关键词:Ⅱ类超晶格  长波  红外探测器
 
Research Progress of Type-II Superlattice Long-wave Infrared Detector
Abstract:Due to the characteristics of tunable bandgap, large electron effective mass, and low Auger recombination rate, type-II superlattices have unique advantages in long-wave and very long-wave infrared detection. The research progress in the preparation of long-wave superlattice detectors is introduced, including band structure design, surface defects control, periodic structure control and surface passivation. Finally, a 320×256 long-wave superlattice focal plane array and its test performance are reported. The results show that at an operating temperature of 77 K, the cut-off wavelength of the array is 9.6 μm, the average peak detection rate D* is 7×1010 cm·Hz1/2/W, the noise equivalent temperature difference (NETD) is 34 mK, and the response non-uniformity is 7%.
keywords:type-II superlattice  long-wave  infrared detector
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