| 碲镉汞表面钝化研究进展 |
| 投稿时间：2020-09-18 修订日期：2020-10-11 点此下载全文 |
| 引用本文：戴永喜,吴立明,祁娇娇,刘世光.碲镉汞表面钝化研究进展[J].红外,2021,42(2):21~28 |
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| 中文摘要:碲镉汞（MCT）红外探测器近些年的发展非常迅速。随着相关技术的不断进步，对探测器的要求也越来越高。MCT探测器的表面对杂质、缺陷、损伤、温度等因素非常敏感，而器件的很多性能直接由其表面的性质决定，因此MCT材料表面的钝化被看成是红外探测器制备的关键工艺之一。为了提高器件表面的稳定性，最常用的方法就是对MCT材料表面进行钝化处理。主要介绍了几种常见的MCT材料表面钝化方法，然后结合国内外文献重点介绍了常见的介质膜钝化方法，并对以后的工作进行了展望。 |
| 中文关键词:碲镉汞 红外探测器 钝化 |
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| Research Progress on Surface Passivation of Mercury Cadmium Telluride |
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| Abstract:HgCdTe (MCT) infrared detectors have achieved very rapid development in recent years. With the continuous progress of related technology, the requirements for detectors are getting higher and higher. The surface of the MCT detector is very sensitive to factors such as impurities, defects, damage and temperature. Many performances of the device can be directly determined by the properties of its surface, so the passivation of the surface of the MCT material is regarded as the key process for the preparation of infrared detectors. In order to improve the surface stability of the device, the most commonly used method is to passivate the surface of the MCT material. This article mainly introduces the common passivation methods on the surface of MCT materials, focuses on the common dielectric film passivation methods combined with domestic and foreign literature, and prospects for future work. |
| keywords:mercury cadmium telluride infrared detector passivation |
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