| 高光谱红外探测器性能研究 |
| 投稿时间：2020-07-25 修订日期：2020-08-31 点此下载全文 |
| 引用本文：李冬冰,徐长彬,于小兵,王晓龙,付志凯.高光谱红外探测器性能研究[J].红外,2020,41(12):1~8 |
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| 中文摘要:介绍了高光谱用红外探测器的性能及使用情况，并将其与国外同类型高光谱红外探测器的关键指标(如信噪比、暗电流、读出噪声等)进行了对比测试分析。经过衬底去除工艺，短波探测器的光谱响应达到0.4~2.6 μm，平均量子效率超过75%，动态范围内响应线性度拟合曲线的R2值都大于 0.99，半阱信噪比可达到1600。该探测器的性能超过了国外报道的同类器件，满足我国高光谱应用需求。 |
| 中文关键词:高光谱 信噪比 衬底去除 |
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| Study on the performance of high-spectrum infrared detector |
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| Abstract:In this paper, the performance and application of hyperspectral infrared detector are introduced. Compared with the same type of foreign hyperspectral infrared detector, such as signal-to-noise ratio, dark current and readout noise, the spectral response of short wave detector reaches 0.4-2.6 μm and the average quantum efficiency is more than 75% after substrate removal process 99, and the half well signal-to-noise ratio can reach 1600. The performance is better than that reported by similar devices abroad and can meet the hyperspectral application in China. |
| keywords:high-spectrum SNR substrate removal |
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