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激光抛光技术在红外探测器组件封装中的应用探索
投稿时间:2020-03-31  修订日期:2020-04-07  点此下载全文
引用本文:方志浩.激光抛光技术在红外探测器组件封装中的应用探索[J].红外,2020,41(6):25~32
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作者单位E-mail
方志浩 华北光电技术研究所 f_zhi_hao@163.com 
中文摘要:提出将激光抛光技术应用于杜瓦部件激光焊焊缝的抛光处理中,以解决目前红外探测器杜瓦封装激光焊焊缝粗糙度大、探测器组件长时间使用过程中杜瓦焊缝强度和内部真空度欠佳、影响探测器寿命和使用性能的问题。通过实验研究了主要参数对抛光质量的影响规律,并利用激光共聚焦显微镜等设备测试了激光抛光结果。激光抛光技术可使激光焊焊缝的表面粗糙度Ra从0.25mm降低到0.03mm。研究结果充分表明,绿色高效非接触的激光抛光可以实现红外探测器杜瓦组件外表面激光焊焊缝的高质量抛光,在红外探测器制造领域有重大的潜在应用价值。
中文关键词:激光抛光  红外探测器  激光焊焊缝  表面质量
 
Application’s exploration of laser polishing technology in package of infrared detector
Abstract:This paper proposes to apply the laser polishing technology to the polishing of laser welding line of Dewar component in order to solve the problem that the laser welding line of Dewar package in infrared detector is rough, the strength of weld line and the internal vacuum degree can’t meet the requirements during the long-term use of detector, which affects life and performance of detector. The experiment studies the influence of the main parameters on the polishing quality, the result of laser polishing is obtained by the laser confocal microscope, and the optimal result shows the surface roughness Ra of laser welding line can reduce from 0.25 mm to 0.03 mm. The research shows that the green high-efficiency non-contact laser polishing can realize the high-quality polishing of the laser welding line on the outer surface of the infrared detector’s Dewar component, and it has great potential application value in the field of infrared detector manufacturing.
keywords:laser polishing  infrared detectors  laser welding line
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