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激光抛光技术在红外探测器组件封装中的应用探索
投稿时间:2020-03-31  修订日期:2020-04-07  点此下载全文
引用本文:方志浩,付志凯,张磊,李胜杰,孙亚京.激光抛光技术在红外探测器组件封装中的应用探索[J].红外,2020,41(6):25~32
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作者单位E-mail
方志浩 华北光电技术研究所 f_zhi_hao@163.com 
付志凯 华北光电技术研究所  
张磊 华北光电技术研究所  
李胜杰 华北光电技术研究所  
孙亚京 华北光电技术研究所  
中文摘要:目前红外探测器杜瓦封装中激光焊焊缝的粗糙度大,探测器组件在长时间使用过程中杜瓦焊缝强度和内部真空度欠佳,进而影响探测器寿命和使用性能。为解决这些问题,提出将激光抛光技术应用于杜瓦部件激光焊焊缝的抛光处理中。通过实验研究了主要参数对抛光质量的影响规律,并利用激光共聚焦显微镜等设备测试了激光抛光结果。结果表明,激光抛光技术可使激光焊焊缝的表面粗糙度Ra从0.25 mm降低到0.03 mm。这充分证明利用绿色高效、非接触的激光抛光可以实现红外探测器杜瓦组件外表面激光焊焊缝的高质量抛光,因此在红外探测器制造领域具有重大的潜在应用价值。
中文关键词:激光抛光  红外探测器  激光焊焊缝  表面质量
 
Application Exploration of Laser Polishing Technology in Package of Infrared Detector Assembly
Abstract:At present, the roughness of the laser welding line of the dewar package of the infrared detector is large. The strength and internal vacuum of the dewar welding line during the long-term use of the detector components are not good, which affects the life and performance of the detector. In order to solve these problems, it is proposed to apply laser polishing technology to the polishing treatment of laser welding line of dewar components. The experiment investigated the influence of main parameters on the polishing quality, and the laser polishing results were tested using the laser confocal microscope. The results show that the laser polishing technology can reduce the surface roughness Ra of the laser welding line from 0.25 mm to 0.03 mm. This fully proves that the use of green, efficient, non-contact laser polishing can achieve high-quality polishing of the laser welding line of the outer surface of the infrared detector dewar components, which has great potential application value in the field of infrared detector manufacturing.
keywords:laser polishing  infrared detector  laser welding line  surface quality
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