| 双层异质结甚长波碲镉汞红外焦平面探测器研究进展 |
| 投稿时间：2020-02-27 修订日期：2020-03-18 点此下载全文 |
| 引用本文：谭振.双层异质结甚长波碲镉汞红外焦平面探测器研究进展[J].红外,2020,41(6):1~8 |
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| 中文摘要:报道了甚长波碲镉汞红外焦平面探测器的最新研究进展。采用水平液相外延In掺杂和垂直液相外延As掺杂技术生长p-on-n异质结材料，并基于湿法腐蚀、表侧壁钝化、In柱互连工艺，制备了第一支甚长波碲镉汞台面型焦平面器件。在60 K的工作温度下，该器件的截止波长达到14.28 μm，有效像元率为94.5%，平均峰值探测率达到8.98×1010 cm·Hz1/2·W-1。 |
| 中文关键词:双层异质结 甚长波 碲镉汞 红外焦平面探测器。 |
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| Developments of double layer heterojunction VLW HgCdTe infrared focal plane arrays |
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| Abstract:This paper reports the latest developments of very long wavelength (VLW) HgCdTe infrared detector in North China Research Institute of Optical-electronics. By the use of horizontal and vertical liquid phase epitaxy, we realized the indium and arsenic doping to make p-on-n double layer heterojunction. Based on wet etch, side passivation, In bump connect process, the first VLW HgCdTe infrared detector was demonstrated with 14.28μm cut off wavelength, the operability is 94.5% and the D* is up to 8.98×1010 cm·Hz1/2·W-1 at 60 K. |
| keywords:double layer heterojunction VLW HgCdTe IRFPA. |
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