| 氟镓酸盐红外玻璃窗口多波段增透保护膜研制 |
| 投稿时间：2019-11-14 修订日期：2019-12-17 点此下载全文 |
| 引用本文：邵淑英,郭猛,易葵,姜雄伟,邵建达.氟镓酸盐红外玻璃窗口多波段增透保护膜研制[J].红外,2020,41(1):1~6 |
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| 中文摘要:氟镓酸盐玻璃是一种性能良好的红外光窗材料。为了提升窗口观测、探测及防护性能，在氟镓酸盐基底上设计和制备了0.4～0.9 μm、1.064 μm、3.7～4.8 μm三波段复合增透保护膜。根据光学性能及环境稳定性要求选择薄膜材料并对膜系进行了设计，然后利用电子束蒸发方法对多层膜进行了制备。测量结果表明，2.9 μm处的水吸收峰拉低了中红外波段的透过率。通过改进工艺及后处理等途径提高了膜层致密度，有效抑制了膜层的水吸收。利用沸水浸泡法对镀膜元件的环境稳定性进行了实验验证。结果表明，经过离子束辅助沉积及退火处理的薄膜样品具有较好的光学性能和环境适应性。 |
| 中文关键词:氟镓酸盐玻璃 红外窗口 三波段 增透保护膜 |
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| Development of Multi-band Anti-reflection Protective Film for Infrared Window Based on Fluorogallate Glass |
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| Abstract:Fluorogallate glass is an infrared window material with good performance. In order to improve the window observation, detection and protection performance, three-band(0.4-0.9 μm, 1.064 μm and 3.7-4.8 μm)composite anti-reflection protective films are designed and prepared on the fluorogallate substrate. According to the requirements of optical performance and environmental stability, the thin-film materials are selected and the membrane system is designed, and then the multilayer film is prepared by the electron beam evaporation method. The measurement results show that the water absorption peak at 2.9 μm lowers the transmittance in the mid-infrared waveband. The film density is improved by improving the process and post-treatment and other ways, and the water absorption of the film layer is effectively suppressed. The environmental stability of the coated components is verified by the boiling-water immersion method. The results show that the thin-film samples processed by ion-assisted deposition and annealing have better optical properties and environmental adaptability. |
| keywords:fluorogallate glass infrared window three-band anti-reflection protective film |
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