1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3Thrust of Microelectronics, Hong Kong University of Science and Technology (Guangzhou), Guangzhou 511453, China;4Shanghai Institute of Intelligent Science and Technology, Tongji University, Shanghai 200092, China;5School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Supported by the National Key Research and Development Program of China (2025YFF0520500); the National Natural Science Foundation of China (62522414, 62305359).
