Defect-Engineered SESAMs via controlled substrate miscut angles: recovery dynamics and optical performance optimization
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1National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2College of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;4Shenzhen JPT Optoelectronics Co., LTD, Shenzhen 518110, China;5Hunan Police Academy, Changsha 410138, China;6.6College of Information Science and Technology, Peking University, Beijing 100871, China

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Supported by the National Key Research and Development Program of China (2022YFB3606200)

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    Abstract:

    Semiconductor saturable absorber mirrors (SESAMs) are vital for enabling ultrafast fiber lasers, yet their mode-locking performance is often constrained by recovery time and nonlinear absorption parameters. Current optimization studies on SESAM mode-locking properties mainly focus on structural and material parameters of the quantum well absorption layer, while systematic research on the directional influence of a key fabrication parameter—the substrate miscut angle during epitaxial growth—remains scarce. This study presents the first systematic investigation into the impact of substrate miscut angles (0°, 2°, and 6° toward the [110] direction) on the structural properties of epitaxially grown InGaAs/GaAsP SESAMs and their mode-locking characteristics, revealing the regulatory effect of different substrate miscut angles on SESAM performance. Comprehensive characterization via high-resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), photoluminescence (PL) spectroscopy, and spectrophotometry reveals that increasing the miscut angle introduces lattice defects, significantly shortening recovery time. However, larger miscut angles also increase surface roughness and nonsaturable losses, degrading nonlinear absorption. In the mode-locking experiment of a Yb-doped fiber laser, SESAMs with the 2°-miscut angle achieved stable mode-locking, outputting 8.2 ps pulses at 1064 nm, while the 6°-miscut sample exhibited deteriorated mode-locking performance due to material quality degradation. This work fills a critical gap in understanding how the substrate miscut angle influences SESAM mode-locking properties, providing a new optimization dimension and theoretical foundation for designing high-performance ultrafast lasers.

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History
  • Received:September 02,2025
  • Revised:June 30,2026
  • Adopted:October 31,2025
  • Online: June 30,2026
  • Published:
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