This work presents the independent development of a silicon ultra-stable optical reference cavity with high-finesse. Silicon exhibits exceptional thermal stability， lower mechanical loss， and superior vibrational insensitivity. An optimized machining process effectively addresses key manufacturing challenges posed by silicon's brittleness and anisotropic properties. The three-stage polishing technology is utilized to achieve ultra-smooth surfaces with ? level roughness （RMS）. The high-reflection film is produced using SiO₂/Ta₂O₅ as the coating material via ion beam sputter deposition. A cavity linewidth measurement method demonstrates a finesse of ~340，000， comparable to top international counterparts. These results demonstrate China’s ability to independently develop high-performance silicon-based ultra-stable optical reference cavities. This advancement holds significance for precision applications like optical clocks and gravitational wave detection.