1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3College of Materials Science and Opto-Electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China;4School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;5School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China;6Huairou Laboratory, Beijing 101499, China
TN386
Supported by the Strategic Priority Research Program of Chinese Academy of Sciences (XDB43020502); CAS Project for Young Scientists in Basic Research (YSBR-064).
