1Shanghai University, School of Microelectronics, Shanghai 200444, China.;2State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Shanghai 200083, China.
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Supported by the National Natural Science Foundation of China (Grant Nos.52071329, 12134016); Youth Innovation Promotion Association, CAS (Grant No. 2022240) Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDB0580000); Open Fund of State Key Laboratory of Infrared Physics (Grant No. SITP-NLIST-YB-2023-08); Shanghai Municipal Science and Technology Yangfan Special Project (Grant No. 23YF1455300)
