石英增强光声光谱研究进展
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1哈尔滨工业大学 激光空间信息全国重点实验室,黑龙江 哈尔滨 150001;2哈尔滨工业大学 郑州高等研究院,河南 郑州 450008

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Research progress on quartz-enhanced photoacoustic spectroscopy
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1National Key Laboratory of Laser Spatial Information, Harbin Institute of Technology, Harbin Heilongjiang 150001, China;2Zhengzhou Advanced Research Institute, Harbin Institute of Technology, Zhengzhou Henan 450008, China

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    摘要:

    石英增强光声光谱(Quartz-enhanced photoacoustic spectroscopy, QEPAS)技术于2002年首次问世,是痕量气体检测领域具有里程碑意义的革命性技术。该技术创新性地采用石英音叉(Quartz tuning fork, QTF)作为声换能器,替代了传统光声光谱(Photoacoustic spectroscopy, PAS)系统中的宽带麦克风。QEPAS技术不仅完整继承了传统光声光谱波长无关性与零背景检测的固有优势,更在系统集成度、成本效益、抗电磁干扰能力以及检测灵敏度等关键性能指标上实现了质的飞跃。在过去二十余年的发展历程中,QEPAS技术取得了一系列突破性进展,对多种目标气体的检测下限已成功突破十亿分之一(Part per billion, ppb)量级。本文系统梳理了QEPAS技术的物理机制与基本原理,深入剖析了QEPAS技术的重要创新方向:先进激光光源的集成与优化、定制化音叉的设计、声学微谐振腔的性能提升。在此基础上,探讨了当前QEPAS技术面临的关键技术瓶颈与挑战,并对其未来发展趋势进行了前瞻性展望。

    Abstract:

    Quartz-enhanced photoacoustic spectroscopy (QEPAS) was first proposed in 2002 and has emerged as a landmark technique for trace gas detection. This technique employs a quartz tuning fork (QTF) as the acoustic transducer, replacing the broadband microphone used in conventional photoacoustic spectroscopy (PAS) systems. QEPAS not only preserves the intrinsic advantages of conventional PAS, such as wavelength-independent operation and zero-background detection, but also offers significant improvements in system integration, cost effectiveness, immunity to electromagnetic interference, and detection sensitivity. Over the past two decades, QEPAS has undergone rapid development, with detection limits for various target gases reaching the part-per-billion (ppb) level. This review systematically summarizes the physical mechanisms and fundamental principles of QEPAS, and further discusses several key innovation directions, including the integration and optimization of advanced laser sources, the design of custom tuning forks, and the performance enhancement of acoustic micro-resonators. On this basis, the major technical bottlenecks and challenges currently faced by QEPAS are analyzed, and future development trends are discussed.

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  • 收稿日期:2026-07-06
  • 最后修改日期:2026-08-17
  • 录用日期:2026-08-18
  • 在线发布日期: 2026-08-18
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