基于28nm CMOS工艺的18-dB增益289-301GHz太赫兹放大器
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东南大学 毫米波全国重点实验室

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国家自然科学基金62188102


A 289-301 GHz amplifier with 18-dB gain in 28-nm CMOS
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The State Key Laboratory of Millimeter-Waves,Southeast University

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the National Natural Science Foundation of China (62188102)

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    摘要:

    传统太赫兹放大器高度依赖于磷化铟(InP)等化合物半导体工艺,面临高昂成本且难以与大规模数字电路集成。相比之下,硅基CMOS工艺具备低成本和高集成度优势,但在太赫兹频段却面临着晶体管固有增益低、高频寄生效应严重以及无源网络损耗巨大等多重挑战,导致目前鲜有高性能CMOS太赫兹放大器报道。为突破CMOS工艺下的太赫兹芯片设计瓶颈,本文创新提出一种基于周期性稳定化技术的太赫兹放大器芯片架构,通过将各级输入阻抗匹配到前级网络的稳定负载区域有效实现了电路的级联稳定性,同时将不可避免的导体损耗吸收至稳定网络内部,在保障增益的同时,进一步提升了电路稳定性。基于该创新架构,本文基于28-nm CMOS工艺,成功研制多款硅基太赫兹放大器芯片。第一款芯片在300 GHz频点仍能保持18 dB增益,并实现了289-301 GHz的3dB工作频带。与目前已报道的CMOS放大器相比,本设计在28-nm CMOS工艺中实现了最高的工作频率,为实现低成本太赫兹集成系统提供了器件支撑。

    Abstract:

    Traditional terahertz amplifiers are highly dependent on compound semiconductor processes such as InP, which suffer from high costs and limited integration ability. In contrast, CMOS processes offer advantages in low cost and high integration. However, they face multiple challenges in the terahertz band, resulting in a scarcity of reported high-performance CMOS terahertz amplifiers. To break through the bottleneck of terahertz chip design in CMOS processes, this paper proposes a terahertz amplifier architecture based on the periodic stabilization technique. This technique enhances the gain at high frequencies while moving the input impedance of each stage into the stable region of the preceding stage at lower frequencies. It also absorbs unavoidable conductor losses into the stabilization network, effectively boosting the overall system gain performance and guaranteeing the overall stability. Multiple amplifier variants were fabricated in a 28-nm CMOS process. AMP1 achieves a peak gain of 18 dB at 300 GHz with a 3-dB gain bandwidth of 289–301 GHz. Compared with reported CMOS amplifiers, this work demonstrates a state-of-the-art operating frequency in 28-nm CMOS.

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  • 收稿日期:2026-06-29
  • 最后修改日期:2026-09-18
  • 录用日期:2026-09-21
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