1中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083,中国;2中国科学院大学,北京 100049,中国;3香港科技大学(广州)微电子学院,广州 511453,中国;4同济大学 上海智能科学与技术研究院,上海 200092,中国;5上海大学 材料科学与工程学院,上海 200444,中国
1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3Thrust of Microelectronics, Hong Kong University of Science and Technology (Guangzhou), Guangzhou 511453, China;4Shanghai Institute of Intelligent Science and Technology, Tongji University, Shanghai 200092, China;5School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Supported by the National Key Research and Development Program of China (2025YFF0520500); the National Natural Science Foundation of China (62522414, 62305359).
