1中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083;2中国科学院大学,北京 100049;3上海科技大学 物质科学与技术学院,上海 201210;4上海大学 微电子学院,上海 201899
1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China;4School of Microelectronics, Shanghai University, Shanghai 201899, China
Supported by the Chinese Academy of Sciences (XDB0580000, GJ0090406), the National Natural Science Foundation of China (12393833, 12227901, U2241219, 12174416, 11991063), and the Science and Technology Commission of Shanghai Municipality (23JC1404100)
