响应度增强的全介质超表面耦合量子阱红外探测器
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1中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083;2中国科学院大学,北京 100049;3上海科技大学 物质科学与技术学院,上海 201210;4上海大学 微电子学院,上海 201899

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All-dielectric metasurface-coupled quantum well infrared photodetectors with enhanced responsivity
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1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China;4School of Microelectronics, Shanghai University, Shanghai 201899, China

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Supported by the Chinese Academy of Sciences (XDB0580000, GJ0090406), the National Natural Science Foundation of China (12393833, 12227901, U2241219, 12174416, 11991063), and the Science and Technology Commission of Shanghai Municipality (23JC1404100)

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    摘要:

    量子阱红外探测器(QWIPs)广泛应用于长波红外探测领域,但仍受限于较低的量子效率。虽然金属微腔能够增强局部耦合,但实现与量子阱层高度完全匹配的场强分布仍面临挑战,且此类方法通常难以兼容厚有源区结构。为了克服这些限制并提高器件响应,开发了一种全介质超表面耦合量子阱红外探测器(MS-QWIP)。该超表面采用干法刻蚀将80周期GaAs/AlGaAs多量子阱材料制备成方形微柱阵列。利用导模共振效应,该结构激发了强烈的纵向电场分量,从而有效地满足了子带间跃迁选择定则,增强了有源区内的吸收。在50 K温度和5 V偏压下的实验结果表明,MS-QWIP的峰值响应率达到545 mA/W,较传统的45°斜面耦合器件提升了两倍。此外,黑体响应率也提高了约1.6倍。值得注意的是,该结构还减小了光敏元的有效电学面积,从而抑制了暗电流。这项工作证明了全介质超表面能够显著提高QWIP的灵敏度和信噪比。

    Abstract:

    Quantum well infrared photodetectors (QWIPs) are widely utilized in long-wave infrared detection applications, yet they are constrained by low quantum efficiency. Although metallic microcavities can enhance local coupling, achieving a field strength that perfectly coincides with the quantum well layers remains challenging, and such approaches are often incompatible with thick active regions. In this study, we developed an all-dielectric metasurface-coupled QWIP (MS-QWIP) to enhance device response. The metasurface features a square micropillar array etched directly into the 80-period GaAs/AlGaAs multi-quantum wells active region. By leveraging the guided-mode resonance effect, this structure excites a strong longitudinal electric field component, effectively satisfying the intersubband transition selection rule for enhanced absorption within the active region. Experimental results at 50 K and a 5 V bias show that the peak responsivity of the MS-QWIP reaches 545 mA/W, a twofold increase over a conventional 45° facet-coupled device. Furthermore, the blackbody responsivity is improved by approximately 1.6 times. Notably, the architecture also reduces the effective electrical area of the photosensitive element, thereby suppressing dark current. This work demonstrates that all-dielectric metasurfaces can significantly enhance the sensitivity and signal-to-noise ratio of QWIPs.

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  • 收稿日期:2026-03-01
  • 最后修改日期:2026-05-24
  • 录用日期:2026-05-18
  • 在线发布日期: 2026-05-18
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