GaAsSb/InAlAs SACM雪崩光电探测器性能研究
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1上海科技大学 信息科学与技术学院,上海 201210;2中国科学院上海技术物理研究所 红外探测全国重点实验室,上海 200083;3国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024

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E-mail: jianxinchen@mail.sitp.ac.cn

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中图分类号:

TN364.2

基金项目:

中国科学院战略性先导科技专项(XDB0980000);国家自然科学基金(62335017、62504232);上海市自然科学基金(23ZR1473500、23ZR1473100)


Study on the performance of GaAsSb/InAlAs SACM avalanche photodetectors
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Affiliation:

1School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China;2National Key Laboratory of Infrared Detection Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;3School of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

Fund Project:

Supported by the Strategic Priority Research Program of the Chinese Academy of Sciences (XDB0980000) ;the National Natural Science Foundation of China (62335017, 62504232); the Natural Science Foundation of Shanghai (23ZR1473500, 23ZR1473100)

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    摘要:

    文章研究了GaAsSb/InAlAs分离吸收-电荷-倍增(SACM)结构APD的光电特性。该异质结具有较小的导带偏移(=0.089 eV),载流子更易注入倍增区。文中设计了3种不同电荷层掺杂浓度(、、)的SACM APD。实验结果表明,当电荷层掺杂浓度为时,器件性能最优,在室温下其截止波长为1.7 ,穿通电压为-10.8 V,在-34.6 V偏压下增益为20.3,对应暗电流密度为0.058 A/cm2,与GaAsSb PIN APD器件相比,增益提升了6.8倍,暗电流得到有效降低。通过调控SACM APD电荷层掺杂浓度,抑制了器件暗电流、提升了增益,为实现高灵敏短波红外APD提供了新途径。

    Abstract:

    The photoelectric characteristics of GaAsSb/InAlAs separate absorption, charge, and multiplication (SACM) avalanche photodetectors were investigated. This heterojunction has a small conduction band offset (=0.089 eV), which facilitates carrier injection into the multiplication region. Three SACM APDs were designed with charge layer doping concentrations of 2×1017 cm-3, 3×1017 cm-3, and 4×1017 cm-3. Results show that the device with 4×1017 cm-3 exhibited the best performance. At room temperature, it achieved a cutoff wavelength of 1.7 , a punch-through voltage of -10.8 V, a gain of 20.3 at -34.6 V, and a corresponding dark current density of 0.058 A/cm2. Compared with the GaAsSb PIN APD, the gain increased by 6.8 times, and the dark current was effectively reduced. Adjusting the charge layer doping concentration suppresses the dark current and improves the gain, providing a new approach for highly sensitive short-wave infrared APDs.

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刘国鑫,黄敏,王楠,柴旭良,梁钊铭,陈建新. GaAsSb/InAlAs SACM雪崩光电探测器性能研究[J].红外与毫米波学报,2026,45(4):711-717. Liu Guo-Xin, Huang Min, Wang Nan, Chai Xu-Liang, Liang Zhao-Ming, Chen Jian-Xin. Study on the performance of GaAsSb/InAlAs SACM avalanche photodetectors[J]. J. Infrared Millim. Waves,2026,45(4):711-717.

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  • 收稿日期:2026-01-04
  • 最后修改日期:2026-07-07
  • 录用日期:2026-03-01
  • 在线发布日期: 2026-06-30
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